photomask
Lithography patterning tool
A photomask is a plate bearing a pattern that light passes through during semiconductor manufacturing, transferring circuit designs onto silicon wafers.
The mask acts as a stencil—opaque areas block light while transparent areas allow it through, creating the intricate patterns that become integrated circuits.
Also called a mask or reticle.
State of being unprotected
- stepperMoves in discrete intervals
- scannerDevice that reads data
- reticleOptical sighting pattern
- overlayCovering placed atop
alignment · develop · printing · ultraviolet · illumination · projection · demagnification
Reflective metal coating
- quartzCrystalline silicon dioxide
- pellicleThin organic membrane
- blankWithout marks or content
- substrateUnderlying supporting material
emulsion · glass plate · repair · metrology · registration marks
Acid-incised metal print
- resistOppose or refuse compliance
- featuresDistinctive qualities or aspects
- linesStrokes connecting two points
- spacesGaps or open areas
contacts · vias · resolution · nanometer · design rules · OASIS · pitch · duty cycle
Miniaturized semiconductor electronics package
- microprocessorCompact computing circuit
- chipSmall broken-off piece
- transistorSemiconductor signal switch
- waferThin crisp disk
silicon · CMOS · MEMS · logic · memory · foundry · fab · interconnect
Introduction of impurities
- particlesMinute pieces of matter
- inspectionFormal assessment of condition
- repairRestore to working order
- pinholeMinute circular opening
bridging · protrusion · intrusion · haze · scratch · foreign material · cleaning
exposure
State of being unprotected
overlay · alignment · develop · printing · ultraviolet · illumination · projection · demagnification
chrome
Reflective metal coating
substrate · emulsion · glass plate · repair · metrology · registration marks
etching
Acid-incised metal print
- resistOppose or refuse compliance
- featuresDistinctive qualities or aspects
- linesStrokes connecting two points
spaces · contacts · vias · resolution · nanometer · design rules · OASIS · pitch · duty cycle
integrated circuit
Miniaturized semiconductor electronics package
- microprocessorCompact computing circuit
- chipSmall broken-off piece
- transistorSemiconductor signal switch
wafer · silicon · CMOS · MEMS · logic · memory · foundry · fab · interconnect · front-end
contamination
Introduction of impurities
- particlesMinute pieces of matter
- inspectionFormal assessment of condition
- repairRestore to working order
pinhole · bridging · protrusion · intrusion · haze · scratch · foreign material · cleaning
photomaskwafer
Thin crisp disk
silicon wafer · substrate · photoresist · workpiece · die
mask, photo, photograph, masquerade, masking, photography, photosynthesis, photoresist, photosensitive