MEMS
Microscale integrated devices
MEMS stands for microelectromechanical systems—tiny mechanical devices built using semiconductor fabrication techniques.
These microscopic machines combine electrical and mechanical components on a single chip, powering everything from smartphone accelerometers to airbag sensors to inkjet printer heads: MEMS technology has revolutionized motion sensing in consumer electronics. (Lowercase mems is the plural of the Hebrew letter.)
Device measuring motion forces
- gyroscopeSpinning disc measuring orientation
- pressureForce upon contact
- microphoneAudio input device
- inertialRelating to resistance to change
biosensor · chemical · humidity · temperature · flow · proximity · resonator · capacitive
Manufacturing miniature structures precisely
- photolithographyLight-transfers patterns onto silicon
- etchingAcid-incised metal print
- siliconMetalloid in electronics
- waferThin crisp disk
cleanroom · lithography · CMOS · deposition · doping · bonding · packaging · maskless
Miniaturized diagnostic analysis platform
- inkjetSpray-based printing method
- implantableCapable of bodily insertion
- smartphoneHandheld connected computer
- automotiveRelating to motor vehicles
aerospace · medical · industrial · consumer · telecommunications · IoT · wearables · navigation
Of stationary electrical charges
- piezoelectricCharge from deformation
- microswitchesMiniature quick-acting electrical switches
- bimetallicHaving two metals
- cantileverBeam supported one end
Devices that detect input
- actuatorsMovement-producing mechanisms
- accelerometersDevices measuring rate of velocity change
- gyroscopesSpinning axis-orientation devices
- resonatorsBodies that amplify vibrations
transducers · microphones · switches · oscillators · cantilevers
At micrometer dimensions
- miniaturizationReducing physical scale significantly
- nanoscaleBillionth-meter dimension
- micronMillionth of a meter
- micrometerMillionth of a meter
submillimeter · microstructure · microstructures · high-density · compact · integration · monolithic · hybrid
Atomic-scale manipulation science
- miniaturizationReducing physical scale significantly
- semiconductorPartial electrical conductor
- integrationCombining into a whole
Metalloid in electronics
- piezoelectricCharge from deformation
- polysiliconMulti-crystal semiconductor material
- goldElement seventy-nine
- aluminumElement thirteen
nickel · polymers · dielectrics · conductors · insulators · substrates · glass · quartz
accelerometer
Device measuring motion forces
- gyroscopeSpinning disc measuring orientation
- pressureForce upon contact
- microphoneAudio input device
inertial · biosensor · chemical · humidity · temperature · flow · proximity · resonator · capacitive · piezoelectric
microfabrication
Manufacturing miniature structures precisely
- photolithographyLight-transfers patterns onto silicon
- etchingAcid-incised metal print
- siliconMetalloid in electronics
wafer · cleanroom · lithography · CMOS · deposition · doping · bonding · packaging · maskless · thin-film
lab-on-a-chip
Miniaturized diagnostic analysis platform
- inkjetSpray-based printing method
- implantableCapable of bodily insertion
- smartphoneHandheld connected computer
automotive · aerospace · medical · industrial · consumer · telecommunications · IoT · wearables · navigation · stabilization
electrostatic
Of stationary electrical charges
- piezoelectricCharge from deformation
- microswitchesMiniature quick-acting electrical switches
- bimetallicHaving two metals
sensors
Devices that detect input
- actuatorsMovement-producing mechanisms
- accelerometersDevices measuring rate of velocity change
- gyroscopesSpinning axis-orientation devices
resonators · transducers · microphones · switches · oscillators · cantilevers
microscale
At micrometer dimensions
- miniaturizationReducing physical scale significantly
- nanoscaleBillionth-meter dimension
- micronMillionth of a meter
micrometer · submillimeter · microstructure · microstructures · high-density · compact · integration · monolithic · hybrid · precision
nanotechnology
Atomic-scale manipulation science
- miniaturizationReducing physical scale significantly
- semiconductorPartial electrical conductor
- integrationCombining into a whole
silicon
Metalloid in electronics
- piezoelectricCharge from deformation
- polysiliconMulti-crystal semiconductor material
- goldElement seventy-nine
aluminum · nickel · polymers · dielectrics · conductors · insulators · substrates · glass · quartz · ceramics