micromachined
Etched extremely small
Micromachined describes something manufactured using techniques that create extremely small mechanical structures, typically at scales measured in micrometers.
The term applies to components like sensors, gears, and valves fabricated through processes borrowed from semiconductor manufacturing: micromachined accelerometers in airbag systems, a micromachined pressure sensor.
The technology enables devices too small for conventional machining.
Acid-incised metal print
- lithographyGrease-based flat plate printing
- photolithographyLight-transfers patterns onto silicon
- depositionFormal testimony under oath
- sputteringParticle ejection from surfaces
patterning · masking · doping · bonding · release · undercutting · selectivity
Movement-producing mechanisms
- sensorsDevices that detect input
- gyroscopesSpinning axis-orientation devices
- accelerometersDevices measuring rate of velocity change
- resonatorsBodies that amplify vibrations
cantilevers · diaphragms · valves · pumps · nozzles · switches · filters · transducers
Metalloid in electronics
- waferThin crisp disk
- substrateUnderlying supporting material
- polysiliconMulti-crystal semiconductor material
- glassTransparent solid from sand
quartz · germanium · piezoelectric · dielectric · thin-film · photoresist · PDMS · nickel
Microscale electromechanical devices
- lab-on-a-chipMiniaturized diagnostic analysis platform
- drug-deliveryAdministering medicine to body
- microphonesAudio input devices
At micrometer dimensions
- nanoscaleBillionth-meter dimension
- micrometerMillionth of a meter
- submillimeterLess than one millimeter
- miniaturizedReduced to tiny size
etching
Acid-incised metal print
- lithographyGrease-based flat plate printing
- photolithographyLight-transfers patterns onto silicon
- depositionFormal testimony under oath
sputtering · patterning · masking · doping · bonding · release · undercutting · selectivity
actuators
Movement-producing mechanisms
- sensorsDevices that detect input
- gyroscopesSpinning axis-orientation devices
- accelerometersDevices measuring rate of velocity change
resonators · cantilevers · diaphragms · valves · pumps · nozzles · switches · filters · transducers · micromotors
silicon
Metalloid in electronics
- waferThin crisp disk
- substrateUnderlying supporting material
- polysiliconMulti-crystal semiconductor material
glass · quartz · germanium · piezoelectric · dielectric · thin-film · photoresist · PDMS · nickel · gold
MEMS
Microscale electromechanical devices
- lab-on-a-chipMiniaturized diagnostic analysis platform
- drug-deliveryAdministering medicine to body
- microphonesAudio input devices
microscale
At micrometer dimensions
- nanoscaleBillionth-meter dimension
- micrometerMillionth of a meter
- submillimeterLess than one millimeter
miniaturized · ultrafine · precision · tolerance · resolution
micromachinedhandcrafted
Made manually, not machined
hand-built · hewn · forged · cast · hand-tooled