microfabrication
Building extremely small
Microfabrication is the process of manufacturing extremely small structures and devices, typically at scales measured in micrometers or smaller.
The term covers techniques used to produce microelectronics, microelectromechanical systems (MEMS), and similar miniaturized components: The chip's circuitry requires precise microfabrication.
Methods include photolithography, etching, and thin-film deposition.
Microscale electromechanical devices
- biochipMolecular-scale diagnostic platform
- biosensorBiological chemical detection device
- accelerometerDevice measuring motion forces
- gyroscopeSpinning disc measuring orientation
Particle-free manufacturing space
- stepperMoves in discrete intervals
- alignerTool that straightens
- maskFace-worn concealment
- photomaskPatterned plate for chip fabrication
wafer · spinner · evaporator · furnace · SEM · developer · glovebox
Light-transfers patterns onto silicon
- etchingAcid-incised metal print
- depositionFormal testimony under oath
- sputteringParticle ejection from surfaces
- CVDGas-to-solid coating process
PVD · diffusion · oxidation · doping · patterning · metallization · annealing · liftoff
Metalloid in electronics
- substrateUnderlying supporting material
- dielectricPolarizable electrical non-conductor
- photoresistLight-sensitive polymer coating
- nitrideNitrogen-element binary compound
polysilicon · germanium · sapphire · quartz · PDMS · gold · aluminum · copper
Correct relative positioning
- resolutionFormal decision or determination
- accuracyDegree of correctness
- overlayCovering placed atop
- yieldProduce or relinquish
uniformity · roughness · dose · exposure · tolerance · registration · linewidth · contamination
MEMS
Microscale electromechanical devices
- biochipMolecular-scale diagnostic platform
- biosensorBiological chemical detection device
- accelerometerDevice measuring motion forces
cleanroom
Particle-free manufacturing space
photomask · wafer · spinner · evaporator · furnace · SEM · developer · glovebox
photolithography
Light-transfers patterns onto silicon
- etchingAcid-incised metal print
- depositionFormal testimony under oath
- sputteringParticle ejection from surfaces
CVD · PVD · diffusion · oxidation · doping · patterning · metallization · annealing · liftoff · bonding
silicon
Metalloid in electronics
- substrateUnderlying supporting material
- dielectricPolarizable electrical non-conductor
- photoresistLight-sensitive polymer coating
nitride · polysilicon · germanium · sapphire · quartz · PDMS · gold · aluminum · copper · tungsten
alignment
Correct relative positioning
- resolutionFormal decision or determination
- accuracyDegree of correctness
- overlayCovering placed atop
yield · uniformity · roughness · dose · exposure · tolerance · registration · linewidth · contamination
microfabricationmass production
Large-scale standardized fabrication
heavy industry · shipbuilding · construction · civil engineering
fabrication, micro, microelectronics, micrometre, micromachining, microfabricated